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Nouvelle traduction : Présentation OR MicA

General Presentation






General Presentation

Purpose : Acoustic Microsystems research impacts four domains: I) acoustic or thermoacoustic microsystems (in coordination with the thermoacoustic R.O.), ii) micro sensors, iii) miniaturised acoustic sources and iv) miniature acoustic systems measurement.

- Modellings

  • Precise analytical modelling of acoustic microsystems behaviour (e.g. Microphones) is carried out taking into account both viscous and thermal effects within boundary layers. FEM modelling.

- Experiments and technologies

  • Design and making of MEMs prototypes (electrostatic microphones, temperature micro-sensors, ...)


Miniature thermoacoustic engines

  • miniature smart stacks
  • heat exhangers
  • miniature thermoacoustic engines
  • micro thermoacoustic sound source
  • Acoustic micro pumps


  • Temperature micro-sensors
  • Moisture measurements
  • MEMs microphones

Acoustic Micro sources (in project)

  • Piezoelectric sources
  • Plasma sources
  • Electromagnetic sources

Mesures (in project)

  • MEMs microphone calibration


Researchers and teachers
E. Gaviot (Prof.), V. Gusev (Prof.), S. Durand (Senior Lecturer), N.Yaakoubi (Senior Lecturer), F.Polet (Senior Lecturer), Ph. Béquin (Senior Lecturer), G. Pennelet (Senior Lecturer), P. Lotton (CNRS Research Officer)

Technical team
L. Camberlein (Research engineer), James Blondeau(ITA CNRS)

PhD Students
Nicolas Giordani (bourse Région Pays de la Loire sur CPER MicroCapOuest), Thierry Le Van Suu (BDI CNRS-Région Pays de la Loire), Guillaume Failleau (bourse CIFRE – LNE).

Thema : Acoustic or thermoacoustic microsystems

- Machines thermoacoustiques miniatures
Team: M. Bruneau, L. Camberlein, S. Durand, E. Gaviot, N. Giordani, V. Gusev, P. Lotton, F. Polet

  • Miniaturised smart stacks
    A first milestone in thermoacoustics scaling down is the prototype of a miniature thermoacoustic refrigerator with a polymer core made in the ENSIM cleanroom. The micro fabrication facilities ( Research Grant from Regional funding program "Micro_Cap_Ouest") have helped for prototypes making. Temperature and acoustic pressure sensors will be integrated inside the thermoacoustic core so to provide measurements which will be compared to the modellings developed in the laboratory. This scaling down may lead to thermoacoustic engines (both sources and refrigerators) adapted to semiconductor components refrigeration.

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    Figure 1 : half miniature stack
  • Heat exchangers
    Miniature heat exchangers are being made in collaboration with MIMENTO facilities (FEMTO-ST, Universté de Franche-Comté – Besançon) using DRIE and UV-LIGA technologies.

  • Miniature thermoacoustic engines
    Thanks to "Micro_Cap_Ouest" Regional fundings and "Micro_ThermAc" ANR fundings, miniature thermoacoustic prototypes have been made. The making of a planar, centimeter-scale, thermoacoustic refridgerator demonstrator is in progress.

  • Micro thermoacoustic sources
    Thanks to "Micro_Cap_Ouest" Regional fundings a thermoacoustic source with a 4 mm outer diameter core, 1 cm long, made of 9 ceramic cells, held in a 6 mm steel pipe has been made.

  • Acoustic micro pumps

Thema : Micro‑sensors

- Temperature micro‑sensors
Team: L. Camberlein, E. Gaviot, N. Giordani, F. Polet, Ph. Béquin, M. Bruneau, P. Lotton, S. Durand, T. Le Van Suu, P. Honzik, Z. Škvor

  • Micro thermocouples
  • Micro Thermal-flow sensors

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    Figure 2: Micro Thermal-flow sensor

- Moisture measurements
Team: L. Camberlein, E. Gaviot, N. Giordani, F. Polet

  • "Micro psychromètre"
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Figure 3: Micro-psychromètre
  • "Point de rosée" detection

- Miniature Microphones :

  • Piezoresistive microphones

    The use of four-terminals piezoresistances enabled a 30% increase of piezoresistive MEMs microphones sensitivity (rear the one obtained with dipolar piezoresistances).

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    Figure 4: stress (Pa) on a 1,2 µm thick silicon membrane of 1x1 mm² surface for an incident acoustic pressure level of 1 Pa - 8 kHz.
  • Electrostatic microphones
    Work performed formerly on acoustic angular-rate sensors have lead to the development of MEMS acoustic sources and sensors. The microphones, designed by the LAUM were made with the help of ESIEE teams and cleanroom facilities. Nowadays, acoustic devices development relies on dedicated microphones designed for metrology purposes. Such purposes have lead LAUM and ČVUT (Prague) researchers to a co-operative development of electrostatic MEMs microphones using the ENSIM cleanroom facilities. Metrology markets concern ground-vehicles aeroacoustic characterisation.

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    Figure 5: Four microphone membranes of 3x3 mm² each.
  • Plasma miniature microphones

Thema : Acoustic Micro sources (in project)

Team: Ph. Béquin, M. Bruneau, P. Lotton, S. Durand, N. Yaakoubi

  • Piezoelectric sources

    Piezoelectric planar sources for planar thermoacoustic engines.

  • Plasma sources

    Plasma acoustic sources for thermoacoustic engines.

  • Electromagnetic sources

Thema : Mesures (in project)

Team: A.M Bruneau, M. Bruneau, P. Lotton, S. Durand, N. Yaakoubi

  • MEMs microphone calibration

External collaborations

- ČVUT Prague (MEMs microphones with non-planar backing electrode)
- ESIEE (Miniature boundary-pressure sensors for ground-vehicle aeroacoustic characterisation, Research Grant CNRT-R2A 2006)
- LMFA – TREFLE (Miniature thermoacoustic engines, ANR "MicroThermAc" Research Grant)
- PALMS * (Microsystems dedicated to thermo-physical parameters and thermal/photonics couplings measurement)
- FEMTO-ST DCEP (Vibrating beam piezoresistive microsensors)


- CPER Micro_Cap_Ouest (2000-2006) + FEDER (2000-2006)
- ANR MicroThermAc
- ANR CND (2007-2013)
- Baumer-Bourdon-Haenni
- Neurelec
- Cidelec
- Jessica_Ouest


Cleanroom facilities(

(*) B. Bêche, Pr, laboratoire PALMS, Université Rennes 1